filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT
scan_file:SCAN_MD_M032_S120_2016-08-05T080753Z_TGT13
sw_ver:667
start_time:"2016-08-05 08:07:53.955647"
end_time:"2016-08-05 12:05:58.960302"
duration:"3:58:05.004655"
channel:ZS
tip_num:2
lin_pos:5.9208056763561459
tip_offset:255.65993362325503
wheel_pos:207
target:13
target_type:SOLGEL
x_orig:43988
y_orig:52960
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:7
z_ret:11060
z_ret_nm:1813.8400000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.3607995727473874
set_pt:7.488517586022736
fadj:7.9566643778133823
ctrl_image:False
mag_phase:True
work_pt:8.424648197149823
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:120
z_settle:120
x_orig_um:253.70724754325505
y_orig_um:-212.12445141670204