filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT
scan_file:SCAN_MD_M032_S120_2016-08-07T073158Z_TGT13
sw_ver:667
start_time:"2016-08-07 07:31:58.011257"
end_time:"2016-08-07 13:21:31.018091"
duration:"5:49:33.006834"
channel:ZS
tip_num:3
lin_pos:4.9668116273746854
tip_offset:119.67034790569869
wheel_pos:204
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:7
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.2036316472114139
set_pt:4.1629663538567181
fadj:4.4229800869764251
ctrl_image:False
mag_phase:True
work_pt:4.683228781325649
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:120
z_settle:120
x_orig_um:79.640283265698685
y_orig_um:-696.45866006776328