filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT scan_file:SCAN_MD_M032_S120_2016-08-07T184210Z_TGT13 sw_ver:667 start_time:"2016-08-07 18:42:10.024361" end_time:"2016-08-08 04:05:28.035375" duration:"9:23:18.011014" channel:ZS tip_num:3 lin_pos:5.0125886930647745 tip_offset:199.78021286335462 wheel_pos:204 target:13 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:7 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:1 ac_gain:1 x_closed:False y_closed:True aborted:False dummy:False res_amp:5.1984435797665371 set_pt:4.1586938277256431 fadj:4.4187075608453501 ctrl_image:False mag_phase:True work_pt:4.6785595602076775 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:120 z_settle:120 x_orig_um:159.75014822335461 y_orig_um:-696.45866006776328