filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT
scan_file:SCAN_MD_M032_S120_2016-08-08T053122Z_TGT13
sw_ver:667
start_time:"2016-08-08 05:31:22.037055"
end_time:"2016-08-08 08:15:31.040265"
duration:"2:44:09.003210"
channel:ZS
tip_num:5
lin_pos:3.1058213168535898
tip_offset:-43.562695506217871
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:39268
y_orig:18368
xsteps:96
x_step:109
x_step_nm:415.70855999999998
xlen_um:39.908021759999997
ysteps:96
y_step:300
y_step_nm:416.66669999999999
ylen_um:40.000003200000002
z_step:4
z_ret:4446
z_ret_nm:729.14400000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.810940718699932
set_pt:7.8486305027847711
fadj:8.339360646982529
ctrl_image:False
mag_phase:True
work_pt:8.829771794150313
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-63.516706386217869
y_orig_um:20.000001600000001