filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT
scan_file:SCAN_MD_M032_S120_2016-08-08T085223Z_TGT13
sw_ver:667
start_time:"2016-08-08 08:52:23.040985"
end_time:"2016-08-08 09:09:47.041326"
duration:"0:17:24.000341"
channel:ZS
tip_num:5
lin_pos:3.1058213168535898
tip_offset:-43.562695506217871
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34480
y_orig:16136
xsteps:32
x_step:328
x_step_nm:1250.9395199999999
xlen_um:40.030064639999999
ysteps:32
y_step:900
y_step_nm:1250.0001
ylen_um:40.000003200000002
z_step:24
z_ret:13348
z_ret_nm:2189.0720000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:-0.084229800869764254
set_pt:-0.10894941634241245
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:-0.07580617815059992
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-81.77737230621787
y_orig_um:23.100001848000002