filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT
scan_file:SCAN_MD_M032_S120_2016-08-08T143727Z_TGT03
sw_ver:667
start_time:"2016-08-08 14:37:27.047732"
end_time:"2016-08-08 18:27:09.052224"
duration:"3:49:42.004492"
channel:ZS
tip_num:5
lin_pos:3.1305409323262379
tip_offset:-0.30336842908367601
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:43988
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:4
y_step_nm:15.25536
ylen_um:3.9053721599999998
z_step:4
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.8524452582589461
set_pt:0.68970778973067826
fadj:1.970550087739376
ctrl_image:False
mag_phase:True
work_pt:2.364677065188906
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:50
z_settle:50
x_orig_um:-2.2560545090836825
y_orig_um:1.9526860799999999