filename:TLM__MD_M033_S121_TARGET_EXPOSE_SCAN___COUNT_3300001.DAT
scan_file:SCAN_MD_M033_S121_2016-08-12T130245Z_TGT13
sw_ver:667
start_time:"2016-08-12 13:02:45.158506"
end_time:"2016-08-12 18:20:04.164711"
duration:"5:17:19.006205"
channel:ZS
tip_num:5
lin_pos:3.1308461127641718
tip_offset:0.23069733730069686
wheel_pos:206
target:13
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:6
z_ret:15279
z_ret_nm:2505.7560000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.7715724422064554
set_pt:2.4429694056610973
fadj:4.0061036087586785
ctrl_image:False
mag_phase:True
work_pt:4.397244875152371
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-39.8603887426993
y_orig_um:-328.17386818698827