filename:TLM__MD_M033_S121_TARGET_EXPOSE_SCAN___COUNT_3300001.DAT
scan_file:SCAN_MD_M033_S121_2016-08-12T201759Z_TGT13
sw_ver:667
start_time:"2016-08-12 20:17:59.167017"
end_time:"2016-08-13 06:21:32.178818"
duration:"10:03:33.011801"
channel:ZS
tip_num:5
lin_pos:3.1308461127641718
tip_offset:0.23069733730069686
wheel_pos:206
target:13
target_type:SOLGEL
x_orig:43268
y_orig:29248
xsteps:352
x_step:7
x_step_nm:26.69688
xlen_um:9.3973017599999995
ysteps:352
y_step:20
y_step_nm:27.77778
ylen_um:9.7777785599999998
z_step:6
z_ret:491
z_ret_nm:80.524000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:9.8051422903791874
set_pt:2.4512092774853134
fadj:4.0201419089036392
ctrl_image:False
mag_phase:True
work_pt:4.412351434890862
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-4.4679535426993056
y_orig_um:-363.28498210698825