filename:TLM__MD_M033_S121_TARGET_EXPOSE_SCAN___COUNT_3300001.DAT scan_file:SCAN_MD_M033_S121_2016-08-13T125934Z_TGT10 sw_ver:667 start_time:"2016-08-13 12:59:34.186600" end_time:"2016-08-13 14:47:42.188715" duration:"1:48:08.002115" channel:ZS tip_num:9 lin_pos:-0.3039597161821927 tip_offset:239.82049668116278 wheel_pos:160 target:10 target_type:SOLGEL x_orig:37446 y_orig:0 xsteps:64 x_step:90 x_step_nm:343.24559999999997 xlen_um:21.967718399999999 ysteps:96 y_step:247 y_step_nm:343.05558300000001 ylen_um:32.933335968000002 z_step:6 z_ret:6279 z_ret_nm:1029.7560000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.3399710078583968 set_pt:6.6718547341115437 fadj:7.0890363927672233 ctrl_image:False mag_phase:True work_pt:7.505910277172444 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:212.91766932116278 y_orig_um:45.511114752000005