filename:TLM__MD_M033_S121_TARGET_EXPOSE_SCAN___COUNT_3300001.DAT
scan_file:SCAN_MD_M033_S121_2016-08-13T171817Z_TGT10
sw_ver:667
start_time:"2016-08-13 17:18:17.191659"
end_time:"2016-08-13 19:06:45.193780"
duration:"1:48:28.002121"
channel:ZS
tip_num:9
lin_pos:-0.30334935530632484
tip_offset:240.88862821393153
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:37446
y_orig:0
xsteps:64
x_step:90
x_step_nm:343.24559999999997
xlen_um:21.967718399999999
ysteps:96
y_step:247
y_step_nm:343.05558300000001
ylen_um:32.933335968000002
z_step:6
z_ret:6279
z_ret_nm:1029.7560000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3027389944304577
set_pt:6.6419470511940188
fadj:7.0572976272220949
ctrl_image:False
mag_phase:True
work_pt:7.472401749149353
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:213.98580085393152
y_orig_um:45.511114752000005