filename:TLM__MD_M033_S121_TARGET_EXPOSE_SCAN___COUNT_3300001.DAT
scan_file:SCAN_MD_M033_S121_2016-08-14T103337Z_TGT10
sw_ver:667
start_time:"2016-08-14 10:33:37.211903"
end_time:"2016-08-14 10:52:08.212265"
duration:"0:18:31.000362"
channel:ZS
tip_num:9
lin_pos:-0.3039597161821927
tip_offset:239.82049668116278
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34000
y_orig:0
xsteps:32
x_step:410
x_step_nm:1563.6743999999999
xlen_um:50.037580799999994
ysteps:32
y_step:1125
y_step_nm:1562.500125
ylen_um:50.000004000000004
z_step:24
z_ret:14302
z_ret_nm:2345.5280000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:0.77729457541771574
set_pt:0.75257495994506751
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:0.699559187498471
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:199.77517668116278
y_orig_um:45.511114752000005