filename:TLM__MD_M033_S121_TARGET_EXPOSE_SCAN___COUNT_3300001.DAT
scan_file:SCAN_MD_M033_S121_2016-08-14T151931Z_TGT03
sw_ver:667
start_time:"2016-08-14 15:19:31.217493"
end_time:"2016-08-15 00:21:33.228091"
duration:"9:02:02.010598"
channel:ZS
tip_num:9
lin_pos:-0.44068055237659265
tip_offset:0.5590333409628695
wheel_pos:48
target:3
target_type:CAL
x_orig:54788
y_orig:42160
xsteps:448
x_step:2
x_step_nm:7.6276799999999998
xlen_um:3.4172006399999999
ysteps:448
y_step:6
y_step_nm:8.3333340000000007
ylen_um:3.7333336320000003
z_step:4
z_ret:147
z_ret_nm:24.108000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3256275272755023
set_pt:6.6602578774700545
fadj:7.0768291752498662
ctrl_image:False
mag_phase:True
work_pt:7.493001254081581
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:39.795819260962865
y_orig_um:-13.044445488000001