filename:TLM__MD_M033_S122_TARGET_EXPOSE_SCAN___COUNT_3300002.DAT
scan_file:SCAN_MD_M033_S122_2016-08-16T225304Z_TGT13
sw_ver:667
start_time:"2016-08-16 22:53:04.282674"
end_time:"2016-08-17 08:55:33.294455"
duration:"10:02:29.011781"
channel:ZS
tip_num:4
lin_pos:4.2087434195468072
tip_offset:319.80098420691223
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:44500
y_orig:25728
xsteps:320
x_step:8
x_step_nm:30.510719999999999
xlen_um:9.763430399999999
ysteps:320
y_step:22
y_step_nm:30.555558000000001
ylen_um:9.7777785599999998
z_step:6
z_ret:559
z_ret_nm:91.676000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3909361409933627
set_pt:6.71274891279469
fadj:7.1320668345159079
ctrl_image:False
mag_phase:True
work_pt:7.551778508154872
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:319.80098420691223
y_orig_um:9.7777785600000016