filename:TLM__MD_M033_S122_TARGET_EXPOSE_SCAN___COUNT_3300002.DAT scan_file:SCAN_MD_M033_S122_2016-08-18T220423Z_TGT13 sw_ver:667 start_time:"2016-08-18 22:04:23.338035" end_time:"2016-08-19 05:58:31.347306" duration:"7:54:08.009271" channel:ZS tip_num:4 lin_pos:4.1171892881666281 tip_offset:159.58125429159884 wheel_pos:211 target:13 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:7 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.5603112840466924 set_pt:6.8482490272373537 fadj:7.2761120012207217 ctrl_image:False mag_phase:True work_pt:7.704214844653361 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:55 z_settle:55 x_orig_um:119.55118965159883 y_orig_um:592.29546928018283