filename:TLM__MD_M033_S122_TARGET_EXPOSE_SCAN___COUNT_3300002.DAT scan_file:SCAN_MD_M033_S122_2016-08-20T093329Z_TGT13 sw_ver:667 start_time:"2016-08-20 09:33:29.379665" end_time:"2016-08-20 19:31:56.391367" duration:"9:58:27.011702" channel:ZS tip_num:4 lin_pos:4.0625619897764551 tip_offset:63.983482108796096 wheel_pos:208 target:13 target_type:SOLGEL x_orig:41940 y_orig:32768 xsteps:320 x_step:8 x_step_nm:30.510719999999999 xlen_um:9.763430399999999 ysteps:320 y_step:22 y_step_nm:30.555558000000001 ylen_um:9.7777785599999998 z_step:6 z_ret:559 z_ret_nm:91.676000000000002 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.5310139620050354 set_pt:6.8247501335164413 fadj:7.2513923857480735 ctrl_image:False mag_phase:True work_pt:7.677847478340109 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:60 z_settle:60 x_orig_um:54.220051708796092 y_orig_um:0.0