filename:TLM__MD_M033_S123_TARGET_EXPOSE_SCAN___COUNT_3300003.DAT
scan_file:SCAN_MD_M033_S123_2016-08-26T145911Z_TGT13
sw_ver:667
start_time:"2016-08-26 14:59:11.554972"
end_time:"2016-08-26 20:29:28.561430"
duration:"5:30:17.006458"
channel:ZS
tip_num:4
lin_pos:4.1355001144426646
tip_offset:191.62520027466275
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:H_L
y_dir:H_L
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.3826199740596632
set_pt:5.9061570153353173
fadj:6.2751201647974364
ctrl_image:False
mag_phase:True
work_pt:6.6443016508737776
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:151.59513563466277
y_orig_um:40.000003200000002