filename:TLM__MD_M033_S123_TARGET_EXPOSE_SCAN___COUNT_3300003.DAT
scan_file:SCAN_MD_M033_S123_2016-08-27T142528Z_TGT10
sw_ver:667
start_time:"2016-08-27 14:25:28.582469"
end_time:"2016-08-27 15:16:27.583466"
duration:"0:50:59.000997"
channel:ZS
tip_num:9
lin_pos:-0.30334935530632484
tip_offset:240.88862821393153
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:39252
y_orig:47168
xsteps:64
x_step:90
x_step_nm:343.24559999999997
xlen_um:21.967718399999999
ysteps:96
y_step:247
y_step_nm:343.05558300000001
ylen_um:32.933335968000002
z_step:24
z_ret:6279
z_ret_nm:1029.7560000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:0.76447699702449068
set_pt:0.72449835965514608
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:0.6880234647364232
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:220.87359589393154
y_orig_um:-20.000001600000001