filename:TLM__MD_M033_S123_TARGET_EXPOSE_SCAN___COUNT_3300003.DAT
scan_file:SCAN_MD_M033_S123_2016-08-30T001335Z_TGT10
sw_ver:667
start_time:"2016-08-30 00:13:35.650281"
end_time:"2016-08-30 02:48:22.653308"
duration:"2:34:47.003027"
channel:ZS
tip_num:9
lin_pos:-0.39459830624856945
tip_offset:81.202964065003457
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:32692
y_orig:384
xsteps:64
x_step:369
x_step_nm:1407.3069599999999
xlen_um:90.067645439999993
ysteps:64
y_step:1012
y_step_nm:1405.555668
ylen_um:89.955562751999992
z_step:7
z_ret:17162
z_ret_nm:2814.5680000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3799496452277413
set_pt:6.7038986800946061
fadj:7.1229114213778892
ctrl_image:False
mag_phase:True
work_pt:7.541890745787402
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:36.16914134500346
y_orig_um:229.05778610470205