filename:TLM__MD_M033_S123_TARGET_EXPOSE_SCAN___COUNT_3300003.DAT
scan_file:SCAN_MD_M033_S123_2016-08-30T025541Z_TGT10
sw_ver:667
start_time:"2016-08-30 02:55:41.653451"
end_time:"2016-08-30 03:16:45.653863"
duration:"0:21:04.000412"
channel:ZS
tip_num:9
lin_pos:-0.39459830624856945
tip_offset:81.202964065003457
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:32708
y_orig:368
xsteps:32
x_step:737
x_step_nm:2810.80008
xlen_um:89.945602559999998
ysteps:32
y_step:2025
y_step_nm:2812.5002250000002
ylen_um:90.000007200000013
z_step:24
z_ret:17149
z_ret_nm:2812.4360000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:0.77943083848325323
set_pt:0.74769207293812467
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:0.7014818079588123
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:36.230162785003458
y_orig_um:229.08000832870206