filename:TLM__MD_M033_S123_TARGET_EXPOSE_SCAN___COUNT_3300003.DAT
scan_file:SCAN_MD_M033_S123_2016-08-30T044053Z_TGT10
sw_ver:667
start_time:"2016-08-30 04:40:53.655508"
end_time:"2016-08-30 06:07:14.657196"
duration:"1:26:21.001688"
channel:ZS
tip_num:9
lin_pos:-0.39520866712443731
tip_offset:80.134832532234711
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:32708
y_orig:368
xsteps:32
x_step:737
x_step_nm:2810.80008
xlen_um:89.945602559999998
ysteps:32
y_step:2025
y_step_nm:2812.5002250000002
ylen_um:90.000007200000013
z_step:6
z_ret:34299
z_ret_nm:5625.0360000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.2706950484473953
set_pt:6.6163118944075681
fadj:7.0301365682459753
ctrl_image:False
mag_phase:True
work_pt:7.443562442244233
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:35.162031252234712
y_orig_um:229.08000832870206