filename:TLM__MD_M034_S126_TARGET_EXPOSE_SCAN___COUNT_3400002.DAT scan_file:SCAN_MD_M034_S126_2016-09-05T221336Z_TGT13 sw_ver:667 start_time:"2016-09-05 22:13:36.845030" end_time:"2016-09-06 06:17:00.854482" duration:"8:03:24.009452" channel:ZS tip_num:4 lin_pos:4.1355001144426646 tip_offset:191.62520027466275 wheel_pos:208 target:13 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:7 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:H_L y_dir:H_L fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.7000839246204311 set_pt:6.959945067521172 fadj:7.3951323720149542 ctrl_image:False mag_phase:True work_pt:7.830009154772835 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:60 z_settle:60 x_orig_um:151.59513563466277 y_orig_um:40.000003200000002