filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT scan_file:SCAN_MD_M034_S127_2016-09-11T173930Z_TGT03 sw_ver:667 start_time:"2016-09-11 17:39:30.008608" end_time:"2016-09-11 22:55:03.014778" duration:"5:15:33.006170" channel:ZS tip_num:5 lin_pos:3.1305409323262379 tip_offset:-0.30336842908367601 wheel_pos:48 target:3 target_type:CAL x_orig:36788 y_orig:16960 xsteps:256 x_step:4 x_step_nm:15.25536 xlen_um:3.9053721599999998 ysteps:256 y_step:11 y_step_nm:15.277779000000001 ylen_um:3.911111424 z_step:4 z_ret:373 z_ret_nm:61.172000000000004 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:3 ac_gain:4 x_closed:False y_closed:True aborted:True dummy:False res_amp:9.7822537575341428 set_pt:7.8257419699397266 fadj:8.3149462119478148 ctrl_image:False mag_phase:True work_pt:8.803953747968587 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:100 z_settle:100 x_orig_um:-29.71570250908367 y_orig_um:21.955557312000003