filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT
scan_file:SCAN_MD_M034_S127_2016-09-12T003503Z_TGT03
sw_ver:667
start_time:"2016-09-12 00:35:03.016733"
end_time:"2016-09-12 06:35:21.023778"
duration:"6:00:18.007045"
channel:ZS
tip_num:3
lin_pos:4.8984512092774857
tip_offset:0.039616235599183369
wheel_pos:48
target:3
target_type:CAL
x_orig:51188
y_orig:16960
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:5.4145113298237586
set_pt:4.331425955596246
fadj:4.6024261844815744
ctrl_image:False
mag_phase:True
work_pt:4.8730188867679125
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:25.546578155599178
y_orig_um:21.955557312000003