filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT
scan_file:SCAN_MD_M034_S127_2016-09-12T122609Z_TGT13
sw_ver:667
start_time:"2016-09-12 12:26:09.034965"
end_time:"2016-09-12 14:50:40.037801"
duration:"2:24:31.002836"
channel:ZS
tip_num:1
lin_pos:6.5372701609826809
tip_offset:-192.277218280309
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:14464
xsteps:64
x_step:164
x_step_nm:625.46975999999995
xlen_um:40.030064639999999
ysteps:64
y_step:450
y_step_nm:625.00004999999999
ylen_um:40.000003200000002
z_step:6
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:7.9996948195620661
fadj:8.4998855573357748
ctrl_image:False
mag_phase:True
work_pt:8.999786374857635
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:120
z_settle:120
x_orig_um:-232.30728292030901
y_orig_um:25.422224256000003