filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT
scan_file:SCAN_MD_M034_S127_2016-09-12T151935Z_TGT13
sw_ver:667
start_time:"2016-09-12 15:19:35.038368"
end_time:"2016-09-12 15:35:32.038681"
duration:"0:15:57.000313"
channel:ZS
tip_num:1
lin_pos:6.5372701609826809
tip_offset:-192.277218280309
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:14464
xsteps:32
x_step:328
x_step_nm:1250.9395199999999
xlen_um:40.030064639999999
ysteps:32
y_step:900
y_step_nm:1250.0001
ylen_um:40.000003200000002
z_step:24
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:0.057068741893644616
set_pt:0.047302967879758906
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:0.05136143229768907
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-232.30728292030901
y_orig_um:25.422224256000003