filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT scan_file:SCAN_MD_M034_S127_2016-09-12T200834Z_TGT13 sw_ver:667 start_time:"2016-09-12 20:08:34.044038" end_time:"2016-09-13 00:55:11.049661" duration:"4:46:37.005623" channel:ZS tip_num:4 lin_pos:3.9798580910963608 tip_offset:-80.74834058136895 wheel_pos:211 target:13 target_type:SOLGEL x_orig:39252 y_orig:18368 xsteps:128 x_step:82 x_step_nm:312.73487999999998 xlen_um:40.030064639999999 ysteps:128 y_step:225 y_step_nm:312.50002499999999 ylen_um:40.000003200000002 z_step:7 z_ret:5721 z_ret_nm:938.24400000000003 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:True dummy:False res_amp:8.5886930647745476 set_pt:6.8708323796444644 fadj:7.3002212558175019 ctrl_image:False mag_phase:False work_pt:7.729758230769323 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:55 z_settle:55 x_orig_um:-100.76337290136894 y_orig_um:572.29546768018281