filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT
scan_file:SCAN_MD_M034_S127_2016-09-13T023932Z_TGT10
sw_ver:667
start_time:"2016-09-13 02:39:32.051709"
end_time:"2016-09-13 04:01:31.053317"
duration:"1:21:59.001608"
channel:ZS
tip_num:9
lin_pos:-0.39490348668650338
tip_offset:80.668898298619084
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:32708
y_orig:32768
xsteps:64
x_step:184
x_step_nm:701.74655999999993
xlen_um:44.911779839999994
ysteps:64
y_step:506
y_step_nm:702.77783399999998
ylen_um:44.977781375999996
z_step:7
z_ret:8570
z_ret_nm:1405.48
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:8.271915770199131
set_pt:6.6175326161593038
fadj:7.0310521095597771
ctrl_image:False
mag_phase:False
work_pt:7.444661082507285
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:35.696097018619085
y_orig_um:184.08000472870205