filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT scan_file:SCAN_MD_M034_S127_2016-09-13T044146Z_TGT10 sw_ver:667 start_time:"2016-09-13 04:41:46.054107" end_time:"2016-09-13 06:15:10.055939" duration:"1:33:24.001832" channel:ZS tip_num:9 lin_pos:-0.39490348668650338 tip_offset:80.668898298619084 wheel_pos:161 target:10 target_type:SOLGEL x_orig:32708 y_orig:32768 xsteps:64 x_step:184 x_step_nm:701.74655999999993 xlen_um:44.911779839999994 ysteps:64 y_step:506 y_step_nm:702.77783399999998 ylen_um:44.977781375999996 z_step:6 z_ret:8570 z_ret_nm:1405.48 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:True dummy:False res_amp:8.2987716487373167 set_pt:6.6388952468146796 fadj:7.0539406424048217 ctrl_image:False mag_phase:True work_pt:7.468831168294433 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:35.696097018619085 y_orig_um:184.08000472870205