filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT scan_file:SCAN_MD_M034_S127_2016-09-13T072546Z_TGT13 sw_ver:667 start_time:"2016-09-13 07:25:46.057325" end_time:"2016-09-13 09:23:01.059625" duration:"1:57:15.002300" channel:ZS tip_num:5 lin_pos:3.1055161364156558 tip_offset:-44.096761272602244 wheel_pos:208 target:13 target_type:SOLGEL x_orig:34480 y_orig:16136 xsteps:96 x_step:109 x_step_nm:415.70855999999998 xlen_um:39.908021759999997 ysteps:96 y_step:300 y_step_nm:416.66669999999999 ylen_um:40.000003200000002 z_step:6 z_ret:4446 z_ret_nm:729.14400000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:3 ac_gain:4 x_closed:False y_closed:True aborted:True dummy:False res_amp:9.7923247119859624 set_pt:7.8336766613260087 fadj:8.3234912642099648 ctrl_image:False mag_phase:True work_pt:8.813017530138767 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-82.311438072602243 y_orig_um:23.100001848000002