filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT
scan_file:SCAN_MD_M034_S127_2016-09-13T092910Z_TGT13
sw_ver:667
start_time:"2016-09-13 09:29:10.059746"
end_time:"2016-09-13 09:39:51.059955"
duration:"0:10:41.000209"
channel:ZS
tip_num:5
lin_pos:3.1055161364156558
tip_offset:-44.096761272602244
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34480
y_orig:16136
xsteps:32
x_step:328
x_step_nm:1250.9395199999999
xlen_um:40.030064639999999
ysteps:32
y_step:900
y_step_nm:1250.0001
ylen_um:40.000003200000002
z_step:24
z_ret:13348
z_ret_nm:2189.0720000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:-0.083009079118028531
set_pt:-0.092774853131914248
fadj:0.0
ctrl_image:False
mag_phase:True
work_pt:-0.07470753788754773
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-82.311438072602243
y_orig_um:23.100001848000002