filename:TLM__MD_M034_S127_TARGET_EXPOSE_SCAN___COUNT_3400003.DAT
scan_file:SCAN_MD_M034_S127_2016-09-13T102119Z_TGT13
sw_ver:667
start_time:"2016-09-13 10:21:19.060769"
end_time:"2016-09-13 12:18:41.063072"
duration:"1:57:22.002303"
channel:ZS
tip_num:5
lin_pos:3.1055161364156558
tip_offset:-44.096761272602244
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34480
y_orig:16136
xsteps:96
x_step:109
x_step_nm:415.70855999999998
xlen_um:39.908021759999997
ysteps:96
y_step:300
y_step_nm:416.66669999999999
ylen_um:40.000003200000002
z_step:6
z_ret:4446
z_ret_nm:729.14400000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:9.7593652246890983
set_pt:7.807431143663691
fadj:8.2954146639200435
ctrl_image:False
mag_phase:True
work_pt:8.783354243036358
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-82.311438072602243
y_orig_um:23.100001848000002