filename:TLM__MD_M034_S128_TARGET_EXPOSE_SCAN___COUNT_3400006.DAT scan_file:SCAN_MD_M034_S128_2016-09-20T205200Z_TGT13 sw_ver:667 start_time:"2016-09-20 20:52:00.270912" end_time:"2016-09-20 21:27:08.271602" duration:"0:35:08.000690" channel:ZS tip_num:4 lin_pos:3.9798580910963608 tip_offset:-80.74834058136895 wheel_pos:211 target:13 target_type:SOLGEL x_orig:41876 y_orig:25568 xsteps:64 x_step:82 x_step_nm:312.73487999999998 xlen_um:20.01503232 ysteps:64 y_step:225 y_step_nm:312.50002499999999 ylen_um:20.000001600000001 z_step:24 z_ret:5721 z_ret_nm:938.24400000000003 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:CON exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:-0.025635156786449988 set_pt:-0.050354772259098193 fadj:0.0 ctrl_image:True mag_phase:True work_pt:-0.023071445524095627 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-90.755856741368945 y_orig_um:562.29546688018274