filename:TLM__MD_M034_S128_TARGET_EXPOSE_SCAN___COUNT_3400007.DAT scan_file:SCAN_MD_M034_S128_2016-09-22T141807Z_TGT10 sw_ver:667 start_time:"2016-09-22 14:18:07.319690" end_time:"2016-09-23 01:15:13.332582" duration:"10:57:06.012892" channel:ZS tip_num:9 lin_pos:-0.39520866712443731 tip_offset:80.134832532234711 wheel_pos:161 target:10 target_type:SOLGEL x_orig:32708 y_orig:32768 xsteps:256 x_step:46 x_step_nm:175.43663999999998 xlen_um:44.911779839999994 ysteps:256 y_step:127 y_step_nm:176.388903 ylen_um:45.155559167999996 z_step:6 z_ret:3227 z_ret_nm:529.22800000000007 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.4031433585107198 set_pt:6.7225146868085757 fadj:7.1424429694056615 ctrl_image:False mag_phase:True work_pt:7.562764910785393 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:35.162031252234712 y_orig_um:184.08000472870205