filename:TLM__MD_M034_S128_TARGET_EXPOSE_SCAN___COUNT_3400007.DAT
scan_file:SCAN_MD_M034_S128_2016-09-23T012346Z_TGT10
sw_ver:667
start_time:"2016-09-23 01:23:46.332750"
end_time:"2016-09-23 01:37:32.333020"
duration:"0:13:46.000270"
channel:ZS
tip_num:9
lin_pos:-0.39520866712443731
tip_offset:80.134832532234711
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:38596
y_orig:16576
xsteps:32
x_step:369
x_step_nm:1407.3069599999999
xlen_um:45.033822719999996
ysteps:32
y_step:1012
y_step_nm:1405.555668
ylen_um:44.977781375999996
z_step:24
z_ret:8581
z_ret_nm:1407.2840000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:0.75196459906919966
set_pt:0.72724498359655143
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:0.6767624020401384
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:57.617921172234716
y_orig_um:206.56889541670205