filename:TLM__MD_M034_S128_TARGET_EXPOSE_SCAN___COUNT_3400007.DAT scan_file:SCAN_MD_M034_S128_2016-09-23T015813Z_TGT10 sw_ver:667 start_time:"2016-09-23 01:58:13.333426" end_time:"2016-09-23 04:18:38.336181" duration:"2:20:25.002755" channel:ZS tip_num:9 lin_pos:-0.39520866712443731 tip_offset:80.134832532234711 wheel_pos:161 target:10 target_type:SOLGEL x_orig:32708 y_orig:32768 xsteps:64 x_step:184 x_step_nm:701.74655999999993 xlen_um:44.911779839999994 ysteps:64 y_step:506 y_step_nm:702.77783399999998 ylen_um:44.977781375999996 z_step:6 z_ret:12856 z_ret_nm:2108.384 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.3753719386587324 set_pt:6.700236514839399 fadj:7.1189440756847482 ctrl_image:False mag_phase:True work_pt:7.537770844800957 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:35.162031252234712 y_orig_um:184.08000472870205