filename:TLM__MD_M034_S128_TARGET_EXPOSE_SCAN___COUNT_3400007.DAT
scan_file:SCAN_MD_M034_S128_2016-09-23T045345Z_TGT01
sw_ver:667
start_time:"2016-09-23 04:53:45.336870"
end_time:"2016-09-23 05:36:28.337708"
duration:"0:42:43.000838"
channel:ZS
tip_num:5
lin_pos:3.1305409323262379
tip_offset:-0.30336842908367601
wheel_pos:16
target:1
target_type:CAL
x_orig:43380
y_orig:32336
xsteps:224
x_step:10
x_step_nm:38.138399999999997
xlen_um:8.5430016000000002
ysteps:32
y_step:27
y_step_nm:37.500003
ylen_um:1.2000000959999999
z_step:4
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.5652704661631187
set_pt:7.6520943007553219
fadj:8.130312046997787
ctrl_image:False
mag_phase:True
work_pt:8.608670441211062
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-4.5748692290836743
y_orig_um:0.60000004800000006