filename:TLM__MD_M034_S128_TARGET_EXPOSE_SCAN___COUNT_3400008.DAT
scan_file:SCAN_MD_M034_S128_2016-09-25T133359Z_TGT13
sw_ver:667
start_time:"2016-09-25 13:33:59.403582"
end_time:"2016-09-25 13:47:07.403840"
duration:"0:13:08.000258"
channel:ZS
tip_num:4
lin_pos:4.1355001144426646
tip_offset:191.62520027466275
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:39252
y_orig:0
xsteps:32
x_step:328
x_step_nm:1250.9395199999999
xlen_um:40.030064639999999
ysteps:32
y_step:900
y_step_nm:1250.0001
ylen_um:40.000003200000002
z_step:24
z_ret:7628
z_ret_nm:1250.992
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:-0.024109254596780347
set_pt:-0.04882887006942855
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:-0.021698145195280412
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:171.61016795466276
y_orig_um:45.511114752000005