filename:TLM__MD_M035_S129_TARGET_EXPOSE_SCAN___COUNT_3500001.DAT
scan_file:SCAN_MD_M035_S129_2016-09-28T185717Z_TGT03
sw_ver:667
start_time:"2016-09-28 18:57:17.494684"
end_time:"2016-09-29 05:33:48.507172"
duration:"10:36:31.012488"
channel:ZS
tip_num:8
lin_pos:0.47486076142519262
tip_offset:-0.74366750591291719
wheel_pos:48
target:3
target_type:CAL
x_orig:44500
y_orig:39328
xsteps:512
x_step:1
x_step_nm:3.8138399999999999
xlen_um:1.9526860799999999
ysteps:512
y_step:3
y_step_nm:4.1666670000000003
ylen_um:2.1333335040000003
z_step:4
z_ret:51
z_ret_nm:8.3640000000000008
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.4783703364614329
set_pt:5.1825741969939729
fadj:5.5066758220798047
ctrl_image:False
mag_phase:True
work_pt:5.8304838760178805
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-0.74366750591291719
y_orig_um:-9.1111118400000013